The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Sep. 27, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Nam-Gun Kim, Yongin-si, KR;
Chan-Mi Lee, Suwon-si, KR;
Samsng Electronics Co., Ltd., , KR;
Abstract
A fabrication method of the semiconductor device comprises forming an isolation layer and an active region, which is defined by the isolation layer, on a substrate, forming an insulating layer on the substrate, forming a plurality of pillar masks, which are spaced from one another by a first gap and a second gap that is smaller than the first gap, on the insulating layer, forming spacers on the plurality of pillar masks, forming mask bridges in regions where the plurality of pillar masks are spaced from one another by the second gap by partially removing the spacers and forming a contact hole, which exposes the active region, by etching the insulating layer using the plurality of pillar masks and the mask bridges.