The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Apr. 27, 2015
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Mark McCord, Los Gatos, CA (US);
Alan Brodie, Palo Alto, CA (US);
James George, Berkeley, CA (US);
Yu Guan, Pleasanton, CA (US);
Ralph Nyffenegger, Palo Alto, CA (US);
Assignee:
KLA-Tenor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01);
U.S. Cl.
CPC ...
G01R 31/2635 (2013.01); G01R 31/2601 (2013.01);
Abstract
Light-emitting devices, such as LEDs, are tested using a photometric unit. The photometric unit, which may be an integrating sphere, can measure flux, color, or other properties of the devices. The photometric unit may have a single port or both an inlet and outlet. Light loss through the port, inlet, or outlet can be reduced or calibrated for. These testing systems can provide increased reliability, improved throughput, and/or improved measurement accuracy.