The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Jul. 10, 2015
Applicant:
Sciaps, Inc., Woburn, MA (US);
Inventor:
David Day, Boxford, MA (US);
Assignee:
SciAps, Inc., Woburn, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/02 (2006.01); G01J 3/443 (2006.01); G01J 3/06 (2006.01); H01L 21/66 (2006.01); G01J 3/44 (2006.01);
U.S. Cl.
CPC ...
G01J 3/443 (2013.01); G01J 3/0208 (2013.01); G01J 3/0237 (2013.01); G01J 3/0272 (2013.01); G01J 3/06 (2013.01); G01J 3/44 (2013.01); H01L 22/26 (2013.01);
Abstract
An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.