The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Feb. 24, 2016
The Regents of the University of Michigan, Ann Arbor, MI (US);
Khalil Najafi, Ann Arbor, MI (US);
Ethem Aktakka, Ann Arbor, MI (US);
THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US);
Abstract
A micro-system with integrated multi-axis actuation and sensing capabilities for in-situ calibration of long-term scale-factor drifts in the output signal of attached or monolithically integrated inertial sensors. The micro-system comprises a piezoelectric actuator, integrated position sensors, and a controller. The controller provides the electrical excitation signals to the actuator and receives and processes signals from the inertial sensors and the position sensors. The electrical excitation signals are adjusted to reduce undesired off-axis motion resulting from environmental vibration during operation or from misalignment and digressions from the process tolerance during fabrication. Capacitive position sensors allow for determination of the trajectory of the piezoelectric actuator and for electrostatic pull-down and lock-down of an actuation plate. Piezoelectric signals and piezoresistive signals are used to improve position sensing precision. The actuator trajectory and the corresponding output of the inertial sensors are used by the controller to determine the device parameters of the inertial sensors.