The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Aug. 12, 2015
Applicant:
Youtec Co., Ltd., Chiba, JP;
Inventor:
Takeshi Kijima, Chiba, JP;
Assignee:
YOUTEC CO., LTD., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23B 19/00 (2006.01); C23C 28/04 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H01L 41/319 (2013.01); C23C 14/02 (2006.01); C23C 14/08 (2006.01); C23C 14/58 (2006.01); H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
C23C 28/042 (2013.01); C23C 14/025 (2013.01); C23C 14/088 (2013.01); C23C 14/5853 (2013.01); H01L 41/0815 (2013.01); H01L 41/1876 (2013.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H01L 41/319 (2013.01); H01L 41/0478 (2013.01);
Abstract
To enhance piezoelectric property. One aspect of the present invention is ferroelectric ceramics including a Pb(ZrTi)Ofilm, wherein: the x satisfies the following formula 1, the Pb(ZrTi)Ofilm has a plurality of columnar single crystals, the x axis, the y axis and the z axis of each of the plurality of columnar single crystals are oriented in the same direction, respectively,0<x<1  formula 1.