The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2018

Filed:

Jul. 15, 2015
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Shuntaro Machida, Kokubunji, JP;

Takashi Kobayashi, Higashimurayama, JP;

Assignee:

HITACHI, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/02 (2006.01); B81C 1/00 (2006.01); C09K 13/00 (2006.01); H01L 21/306 (2006.01); C23F 4/00 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0292 (2013.01); B81C 1/00182 (2013.01); B81C 1/00476 (2013.01); B81C 1/00611 (2013.01); B81C 1/00158 (2013.01); B81C 1/00214 (2013.01); B81C 1/00531 (2013.01); B81C 2201/0104 (2013.01); B81C 2201/0107 (2013.01); B81C 2201/0109 (2013.01); C09K 13/00 (2013.01); C23F 4/00 (2013.01); H01L 21/30604 (2013.01); H01L 29/84 (2013.01); Y10T 29/49156 (2015.01);
Abstract

Disclosed is an ultrasonic transducer that is provided with: a bottom electrode; an electric connection part which is connected to the bottom electrode from the bottom of the bottom electrode; a first insulating film which is formed so as to cover the bottom electrode; a cavity which is formed on the first insulating film so as to overlap the bottom electrode when seen from above; a second insulating film which is formed so as to cover the cavity; and a top electrode which is formed on the second insulating film so as to overlap the cavity when seen from above. The electric connection part to the bottom electrode is positioned so as to not overlap the cavity when seen from above.


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