The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Jun. 04, 2015
Lenovo Enterprise Solutions (Singapore) Pte. Ltd., New Tech Park, SG;
John Dangler, Rochester, MN (US);
Brian L. Carlson, Rochester, MN (US);
Roger Krabbenhoft, Rochester, MN (US);
Kevin A. Splittstoesser, Rochester, MN (US);
Jeffrey A. Taylor, Morrisville, NC (US);
LENOVO ENTERPRISE SOLUTIONS (SINGAPORE) PTE. LTD., New Tech Park, SG;
Abstract
An apparatus includes a spray module with at least one column of spray nozzles. Each spray nozzle is configured to deliver a processing substance on a semiconductor substrate during a process for semiconductor manufacturing as the semiconductor substrate moves past the spray module. The at least one column of spray nozzles is arranged with respect to a direction of travel of the semiconductor substrate so the semiconductor substrate passes the spray nozzles. A location module identifies a location of the semiconductor substrate with respect to the spray module. A spray pattern module determines a spray pattern of where a processing substance is to be delivered to the semiconductor substrate and a nozzle control module actuates each spray nozzle independently based on the spray pattern and a location of the semiconductor identified by the location module.