The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Jul. 27, 2015
Applicant:

Apct Co., Ltd, Sejong-si, KR;

Inventors:

Jung Woo Ko, Seoul, KR;

Jeong Hun Oh, Siheung-si, KR;

Kyu Bin Park, Pohang-si, KR;

Hyun Kook Park, Busan, KR;

Heung Su Jung, Yongin-si, KR;

Assignee:

APCT CO., LTD, Sejong, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); C25D 3/32 (2006.01); C25D 7/12 (2006.01); C25D 5/02 (2006.01); C25D 3/46 (2006.01); C25D 5/10 (2006.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); C25D 3/32 (2013.01); C25D 3/46 (2013.01); C25D 5/02 (2013.01); C25D 5/10 (2013.01); C25D 7/123 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 24/13 (2013.01); H01L 24/94 (2013.01); H01L 2224/0345 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/1147 (2013.01); H01L 2224/11462 (2013.01); H01L 2224/11849 (2013.01); H01L 2224/13111 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/13155 (2013.01); H01L 2224/94 (2013.01); H01L 2924/0132 (2013.01); H01L 2924/10253 (2013.01);
Abstract

Disclosed is a tin-based electroplating solution for forming solder bumps of a flip chip package. The tin-based electroplating solution includes tin methanesulfonate, silver methanesulfonate, methanesulfonic acid, a fluorinated surfactant, an aromatic polyoxyalkylene ether, and water. Also disclosed is a method for forming solder bumps by using the electroplating solution. The method includes (1) electroplating a silicon wafer having a protective layer through which an electrode pad is exposed and an under bump metallurgy (UBM) layer with a copper or copper/nickel plating solution to form copper or copper/nickel pillars on the under bump metallurgy layer and (2) electroplating the pillars with the tin-based electroplating solution to form solder bumps.


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