logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9869930 B1

PDFFull Text
Date of Patent:
Jan. 16, 2018

Filed:

Nov. 10, 2015

Compound, resin, resist composition and method for producing resist pattern

Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Tatsuro Masuyama, Osaka, JP;

Yuichi Mukai, Osaka, JP;

Koji Ichikawa, Osaka, JP;

Assignee:

SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Sin Lee

Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01); G03F 7/16 (2006.01); C08F 220/22 (2006.01); C08F 220/28 (2006.01); C08F 14/18 (2006.01); C07C 69/734 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C07C 69/734 (2013.01); C08F 14/185 (2013.01); C08F 220/22 (2013.01); C08F 220/28 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/168 (2013.01); G03F 7/2041 (2013.01); G03F 7/30 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01); G03F 7/38 (2013.01); C07C 2601/14 (2017.05); C07C 2603/74 (2017.05); C08F 2220/283 (2013.01);
Abstract

A compound represented by formula (I), a resin including a structural unit derived from the compound and a resist composition including the resin: wherein Rrepresents a hydrogen atom, a halogen atom or a Cto Calkyl group in which a hydrogen atom may be replaced by a halogen atom, Rrepresents a Cto Cfluorinated saturated hydrocarbon group, Arepresents a single bond, a Cto Calkanediyl group or *-A-X-(A-X)a-(A)b-, * represents a binding site to an oxygen atom, A, A, Aand Aeach independently represent a Cto Calkanediyl group, Xand Xeach independently represent —O—, —CO—O— or —O—CO—, Wrepresents a Cto Cdivalent alicyclic hydrocarbon group, a represents 0 or 1, and b represents 0 or 1.

Find Patent Forward Citations

Loading…