The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Dec. 03, 2012
Applicant:

Sagem Defense Securite, Boulogne, Billancourt, FR;

Inventor:

Alain Jeanroy, Boulogne Billancourt, FR;

Assignee:

Sagem Defense Securite, Boulogne-Billancourt, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/574 (2012.01); H01L 29/84 (2006.01); B81B 3/00 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01); B81B 3/0021 (2013.01); B81C 99/003 (2013.01); B81C 99/0025 (2013.01); B81C 99/0045 (2013.01);
Abstract

An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.


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