The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Mar. 26, 2014
Applicants:

Oerlikon Surface Solutions Ag, Trübbach, Trübbach, CH;

Eth Zürich, Zürich, CH;

Empa, Dübendorf, CH;

Inventors:

Matthias Lukas Sobiech, Wasserburg, DE;

Sebastian Stein, Achern, DE;

Paul Heinrich Böttger, Zürich, CH;

Valery Shklover, Zürich, CH;

Jörg Patscheider, Meilen, CH;

Assignees:

Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon, CH;

ETH ZÜRICH, Zürich, CH;

EMPA, Dübendorf, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 28/00 (2006.01); C23C 28/04 (2006.01); B23B 27/14 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3492 (2013.01); B23B 27/148 (2013.01); C23C 14/0042 (2013.01); C23C 14/0084 (2013.01); C23C 14/0641 (2013.01); C23C 14/0676 (2013.01); C23C 28/042 (2013.01); C23C 28/044 (2013.01); C23C 28/42 (2013.01); C23C 28/44 (2013.01); B23B 2222/64 (2013.01); B23B 2222/88 (2013.01); B23B 2228/08 (2013.01); B23B 2228/10 (2013.01);
Abstract

A hard material layer system with a multilayer structure, comprising alternating layers A and B, with A layers having the composition MeONin atomic percent and B layers having the composition MeONin atomic percent, where the thermal conductivity of the A layers is greater than the thermal conductivity of the B layers. Meand Meeach comprise at least one metal of the group Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and Al, pindicates the atomic percentage of Meand pindicates the atomic percentage of Meand the following is true: P=P, nindicates the oxygen concentration in the A layers in atomic percent and nindicates the oxygen concentration in the B layers in atomic percent and the following is true: n<n, and mindicates the nitrogen concentration in the A layers in atomic percent and mindicates the nitrogen concentration in the B layers in atomic percent and the following is true: p/(n+m)=p/(n+m).


Find Patent Forward Citations

Loading…