The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Feb. 23, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Shoichi Doi, Shiga, JP;

Tatsuya Nishiwaki, Shiga-ken, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/22 (2006.01); C23C 14/34 (2006.01); C23C 14/46 (2006.01); C23C 14/04 (2006.01); C23C 14/06 (2006.01); H01J 37/34 (2006.01); G02F 1/1337 (2006.01);
U.S. Cl.
CPC ...
C23C 14/221 (2013.01); C23C 14/042 (2013.01); C23C 14/0605 (2013.01); C23C 14/225 (2013.01); C23C 14/3442 (2013.01); C23C 14/46 (2013.01); G02F 1/13378 (2013.01); G02F 1/133734 (2013.01); H01J 37/3411 (2013.01); H01J 37/3426 (2013.01); H01J 2237/3146 (2013.01);
Abstract

A method for forming an alignment film for a liquid crystal on a substrate and an associated at least one structure. The substrate is moved in a first direction. A target is disposed on the first surface side of the substrate. The ion beam is propagated from an ion source toward the substrate and impinges on a sputtering surface of the target, which sputters a material of the target and results in sputtered particles of the material being emitted from the sputtering surface of the target and deposited on the first surface side of the substrate to form (i) a sputtering film on the first surface side of the substrate and (ii) an alignment film having an orientation and being disposed on the sputtering film and on the entire surface of the substrate. The alignment film aligns molecules of the liquid crystal in a predetermined direction.


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