The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Oct. 14, 2015
Applicant:
Microchip Technology Incorporated, Chandler, AZ (US);
Inventors:
Wan-Thai Hsu, Hsinchu, TW;
John Ryan Clark, Howell, MI (US);
Assignee:
Microchip Technology Incorporated, Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/2431 (2013.01); H03H 9/02244 (2013.01); H03H 9/02259 (2013.01); H03H 9/02338 (2013.01); B81B 2201/0271 (2013.01); H03H 9/2452 (2013.01); H03H 2009/0233 (2013.01); H03H 2009/02251 (2013.01); H03H 2009/02283 (2013.01); H03H 2009/02307 (2013.01); H03H 2009/02346 (2013.01); H03H 2009/02496 (2013.01);
Abstract
A multiple coil spring MEMS resonator includes a center anchor and a resonator body including two or more coil springs extending in a spiral pattern from the center anchor to an outer closed ring. Each pair of coil springs originates from opposing points on the center anchor and extends in the spiral pattern to opposing points on the outer ring. The number of coil springs, the length and the width of the coil springs and the weight of the outer ring are selected to realize a desired resonant frequency.