The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Mar. 28, 2014
The Regents of the University of California, Oakland, CA (US);
Clark T.-C. Nguyen, Oakland, CA (US);
Lingqi Wu, Albany, CA (US);
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US);
Abstract
A micromechanical resonator having one or more anchoring stems which are hollow to increase resonator Q factor. By way of example a micromechanical disk resonator embodiment is shown utilizing a resonant micromechanical disk anchored by a stem between at least one electrode used for input and output. To increase resonator Q, a hollow stem is utilized in which an outer thickness of stem material surrounds a hollow area interior of the stem, or that is fabricated with a plurality of vias and/or fabricated substructures containing hollow spaces in the stem material. Measurements have confirmed that Q values can be increased using the hollow core stems by a factor of 2.9 times in certain implementations and operating modes.