The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Oct. 21, 2013
Creative Technology Corporation, Tokyo, JP;
Yoshiaki Tatsumi, Kawasaki, JP;
Toshifumi Sugawara, Kawasaki, JP;
CREATIVE TECHNOLOGY CORPORATION, Kawasaki-shi, Kawasaki, JP;
Abstract
An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck () provided with a base member () and an electrostatic suction layer (). The base member () is formed by a lower-surface plate (), side-surface plates (-), and an upper-surface plate (), and has a part () for a plurality of individual structures configured therein. The part () for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes () and enables the weight of the base member () to be reduced and the strength thereof increased.