The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 09, 2018

Filed:

Feb. 06, 2015
Applicant:

Zhejiang Sci-tech University, Zhejiang, CN;

Inventors:

Benyong Chen, Zhejiang, CN;

Liping Yan, Zhejiang, CN;

Enzheng Zhang, Zhejiang, CN;

Bin Xu, Zhejiang, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
G01B 11/00 (2013.01); G01B 9/02003 (2013.01); G01B 9/02007 (2013.01); G01B 9/0207 (2013.01); G01B 9/02021 (2013.01); G01B 9/02027 (2013.01); G01B 9/02061 (2013.01); G01B 2290/70 (2013.01);
Abstract

A laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination includes a part for determining the straightness and its position based on laser heterodyne interferometry and a part for error determination and compensation. The optical path for determination of four DOFs errors including three common beam-splitters, a polarizing beam-splitter, a planar mirror, a convex lens, a position-sensitive detector and two quadrant detectors is added in the optical configuration of the part for determining the straightness and its position based on laser heterodyne interferometry.


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