The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Aug. 13, 2013
Konkuk University Industrial Cooperation Corp., Seoul, KR;
Yo-Sep Min, Gyeonggi-do, KR;
KONKUK UNIVERSITY INDUSTRIAL COOPERATION CORP., Seoul, KR;
Abstract
The present disclosure relates to a MoSthin film and a method for manufacturing the same. The present disclosure provides a MoSthin film and a method for manufacturing the same using an atomic layer deposition method. In particular, the MoSthin film is manufactured by an atomic layer deposition method without using a toxic gas such as HS as a sulfur precursor. Thus, the present disclosure is eco-friendly. Furthermore, it is possible to prevent the damage and contamination of manufacturing equipment during the manufacturing process. In addition, it is possible to manufacture the MoSthin film by precisely controlling the thickness of the MoSthin film to the level of an atomic layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile