The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Aug. 19, 2015
Applicant:
Electronics and Telecommunications Research Institute, Daejeon, KR;
Inventors:
Sang Kyun Lee, Gwangju, KR;
Yil Suk Yang, Daejeon, KR;
Assignee:
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); H03H 3/02 (2006.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01); H03H 3/08 (2006.01); H02N 2/18 (2006.01); H01M 10/052 (2010.01); B81B 3/00 (2006.01); H01M 6/40 (2006.01); H01M 10/0585 (2010.01);
U.S. Cl.
CPC ...
B81C 1/00682 (2013.01); H01L 41/094 (2013.01); H01L 41/1134 (2013.01); H01L 41/1136 (2013.01); H01M 10/052 (2013.01); H02N 2/18 (2013.01); H02N 2/181 (2013.01); H02N 2/188 (2013.01); H03H 3/02 (2013.01); H03H 3/08 (2013.01); B81B 3/0051 (2013.01); B81C 1/0015 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/053 (2013.01); H01M 6/40 (2013.01); H01M 10/0585 (2013.01); Y02E 60/122 (2013.01); Y10T 29/42 (2015.01); Y10T 29/43 (2015.01);
Abstract
A method of manufacturing an apparatus for harvesting and storing piezoelectric energy includes forming a groove at a side on a substrate. The method further includes embedding and planarizing a polymer in the groove, forming a piezoelectric energy harvesting device, which converts and stores an external vibration into electric energy, onto the substrate, and forming a piezoelectric MEMS cantilever by forming a hole at a side of the piezoelectric energy harvesting device and by removing the polymer in the groove through the hole.