The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Mar. 07, 2016
Globalfoundries Inc., Grand Cayman, KY;
Janakiraman Viraraghavan, Bengaluru, IN;
Ramesh Raghavan, Bengaluru, IN;
Balaji Jayaraman, Bengaluru, IN;
Thejas Kempanna, Bengaluru, IN;
Rajesh R. Tummuru, Bengaluru, IN;
Toshiaki Kirihata, Poughkeepsie, NY (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Aspects of the present disclosure include methods and test structures for an intermediate metal level of an integrated circuit (IC). A method according to the present disclosure can include: fabricating a first plurality of metal levels including an intermediate metal level of an IC structure, the intermediate metal level being one of a plurality of metal levels in the IC structure other than a capping metal level of the IC structure; performing a first functional test on a first circuit positioned within the intermediate metal level; fabricating a second plurality of metal levels after performing the first functional test, the second plurality of metal levels including the capping metal level of the IC structure; and performing a second functional test on a second circuit positioned within the plurality of metal levels, after the fabricating of the capping metal level.