The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Jun. 04, 2014
Applicant:
Samsung Electronics Co., Ltd, Suwon-si, KR;
Inventors:
Yuhua Niu, Waltham, MA (US);
Peter T. Kazlas, Sudbury, MA (US);
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 51/50 (2006.01); C23C 18/12 (2006.01); H01L 29/15 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02628 (2013.01); C23C 18/1216 (2013.01); C23C 18/1233 (2013.01); C23C 18/1241 (2013.01); C23C 18/1245 (2013.01); C23C 18/1254 (2013.01); H01L 21/02565 (2013.01); H01L 29/15 (2013.01); H01L 29/24 (2013.01); H01L 51/5072 (2013.01); C23C 18/1275 (2013.01); C23C 18/1283 (2013.01); H01L 2251/303 (2013.01);
Abstract
A method for preparing a sol-gel film is disclosed. The method comprises providing a sol-gel composition comprising one or more sol-gel film precursors and a crystallization aid, and processing the sol-gel composition by solution processing to form the sol-gel film. In certain embodiments, the sol-gel film comprises one or more metal oxides. A preferred crystallization aid includes triphenylphosphine oxide. A composition for making a sol-gel film, a sol-gel film, a device including a sol-gel film and a method for making such device are also disclosed.