The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2018

Filed:

Mar. 01, 2013
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Akiko Kakutani, Yokohama, JP;

Kiyoshi Hashimoto, Yokohama, JP;

Kiyokazu Sato, Tokyo, JP;

Akihiro Osanai, Yokohama, JP;

Takeshi Yoshiyuki, Yokohama, JP;

Tsutomu Kurusu, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 27/24 (2006.01); H01J 27/02 (2006.01); A61N 5/10 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 27/24 (2013.01); H01J 27/024 (2013.01); A61N 2005/1085 (2013.01); H01J 37/08 (2013.01);
Abstract

According to one embodiment, there is provided an ion source. The ion source includes a vacuum-exhausted vacuum chamber, a target which is set in the vacuum chamber and generates a plurality of valences of ions by irradiation of a laser beam, an acceleration electrode which is applied with voltage in order to accelerate the ions generated by the target, and an intermediate electrode which is provided between the target and the acceleration electrode and is applied with reverse voltage of the voltage applied to the acceleration electrode.


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