The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Oct. 05, 2015
Applicant:
Rf Micro Devices, Inc., Greensboro, NC (US);
Inventors:
Jonathan Hale Hammond, Oak Ridge, NC (US);
Julio C. Costa, Oak Ridge, NC (US);
Assignee:
Qorvo US, Inc., Greensboro, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 49/00 (2006.01); H01H 1/00 (2006.01); H01H 59/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H01H 49/00 (2013.01); B81C 1/0023 (2013.01); H01H 1/0036 (2013.01); H01H 59/0009 (2013.01); B81B 2201/014 (2013.01); B81C 2203/0145 (2013.01);
Abstract
Encapsulated MEMS switches are disclosed along with methods of manufacturing the same. A first sacrificial layer is used to form the actuation member of the MEMS switch. A second sacrificial layer is used to form the enclosure that encapsulates the MEMS switch.