The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Mar. 24, 2016
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Osamu Tanitsu, Kumagaya, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/72 (2006.01); G03B 27/54 (2006.01); G02B 27/09 (2006.01); G03F 7/20 (2006.01); G02B 27/28 (2006.01); F21V 9/14 (2006.01); F21V 13/02 (2006.01); F21V 14/00 (2006.01); G02B 27/10 (2006.01); G02B 27/12 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0927 (2013.01); F21V 9/14 (2013.01); F21V 13/02 (2013.01); F21V 14/003 (2013.01); G02B 27/0938 (2013.01); G02B 27/1086 (2013.01); G02B 27/126 (2013.01); G02B 27/286 (2013.01); G03F 7/70058 (2013.01); G03F 7/70116 (2013.01); G03F 7/70566 (2013.01);
Abstract
An illumination optical apparatus has an optical unit. The optical unit has a light splitter to split an incident beam into two beams; a first spatial light modulator which can be arranged in an optical path of a first beam; a second spatial light modulator which can be arranged in an optical path of a second beam; and a light combiner which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements arranged two-dimensionally and controlled individually.