The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Aug. 19, 2016
Applicant:
Optokey, Inc., Hayward, CA (US);
Inventors:
Fanqing Frank Chen, Moraga, CA (US);
Robert P. Chebi, San Carlos, CA (US);
Assignee:
OPTOKEY, INC., Hayward, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/55 (2014.01); G01N 21/65 (2006.01);
U.S. Cl.
CPC ...
G01N 21/658 (2013.01);
Abstract
In improved nonoplasmonic resonator (NPR) structure includes a silicon substrate having an upper surface, and a plurality of columns of silicon extending up from the substrate upper surface. Each of the columns includes a sidewall and terminates at an upper end. An insulation material is disposed on the sidewalls and upper ends of the columns. For each of the columns, the insulation material terminates in a bulge at an upper end of the column. A conductive layer is disposed on the insulation material along the column sidewalls and upper ends.