The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Jun. 21, 2016
Applicant:
Mp High Tech Solutions Pty Ltd, Eveleigh, NSW, AU;
Inventor:
Marek Steffanson, Mosman, AU;
Assignee:
MP High Tech Solutions Pty Ltd, Eveleigh, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01J 5/10 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01J 5/10 (2013.01); B81C 1/0019 (2013.01); B81C 2201/0132 (2013.01);
Abstract
A method of fabricating electromagnetic radiation detection devices including: forming a first mask on a substrate; forming a structural layer on the substrate using the first mask; forming a metallic layer overlying the structural layer; removing the first mask; forming a second mask on the substrate, the second mask comprising mask openings; selectively patterning the metallic layer using the mask openings; and removing the second mask.