The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Apr. 17, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph Yudovsky, Campbell, CA (US);
Kenric Choi, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 11/02 (2006.01); C23C 16/448 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4481 (2013.01); C23C 16/4408 (2013.01); Y10T 137/87676 (2015.04);
Abstract
Apparatus and methods for supplying a gas to a processing chamber are described. The apparatus comprises an inlet line, an outlet line and a fill line in fluid communication an ampoule. The apparatus described, and methods of use, allow a precursor ampoule to be refilled during processing without removing or replacing the ampoule and interrupting the process.