The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2018

Filed:

Oct. 17, 2016
Applicant:

Funai Electric Co., Ltd., Osaka, JP;

Inventors:

Christopher A. Craft, Lexington, KY (US);

David L. Bernard, Lexington, KY (US);

Andrew L. McNees, Lexington, KY (US);

Sean T. Weaver, Lexington, KY (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05B 1/02 (2006.01); B41J 2/14 (2006.01); H01L 41/25 (2013.01); H01L 41/312 (2013.01); H01L 41/332 (2013.01); H01L 41/053 (2006.01);
U.S. Cl.
CPC ...
B05B 1/02 (2013.01); B41J 2/1433 (2013.01); H01L 41/0533 (2013.01); H01L 41/25 (2013.01); H01L 41/312 (2013.01); H01L 41/332 (2013.01);
Abstract

A fluid ejection head and a method of making a fluid ejection head. The method includes providing a semiconductor substrate containing a plurality fluid ejection actuators on a device surface thereof. The substrate is reactive ion etched to form one or more fluid supply vias therein. A flow feature layer is laminated to the substrate and is exposed to ultra violet (UV) radiation through a photo mask to provide UV exposed areas of the flow feature layer. The flow feature layer is heated to cross-link material in the UV exposed areas. A nozzle plate layer is laminated to the flow feature layer and exposed to UV radiation through a photo mask to provide UV exposed areas for nozzle holes. The nozzle plate layer is cross-linked with heat and the flow feature layer and nozzle plate layer are developed to form the flow features and nozzle holes in the respective layers.


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