The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Mar. 02, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Fen Chen, Williston, VT (US);

Cathryn J. Christiansen, Huntington, VT (US);

Deborah M. Massey, Jericho, VT (US);

Prakash Periasamy, Essex Junction, VT (US);

Michael A. Shinosky, Jericho, VT (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 31/28 (2006.01); H01L 21/00 (2006.01); G01N 1/00 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2858 (2013.01); G01N 1/00 (2013.01); H01L 21/00 (2013.01); H01L 2221/00 (2013.01);
Abstract

A system for electromigration testing is disclosed. The system includes a conductive member, a cap layer of insulative material over at least a portion of a top surface of the conductive member, a cathode conductively connected to a first end of the conductive member; an anode conductively connected to a second end of the conductive member, and a current source conductively connected to the cathode and the anode. A plurality of sensory pins are disposed along a length of the conductive member between the first end and the second end of the conductive member. The sensory pins are conductively connected to a bottom surface of the conductive member. At least one measurement device is conductively connected to at least one sensory pin of the plurality of sensory pins. The at least one measurement device determines a resistance of at least one portion of the conductive member.


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