The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Dec. 16, 2016
Applicant:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Inventors:
Zhenqiang Ma, Middleton, WI (US);
Jung-Hun Seo, East Amherst, NY (US);
Assignee:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 31/02 (2006.01); C30B 33/02 (2006.01); C30B 29/04 (2006.01); H01L 21/324 (2006.01); H01L 21/04 (2006.01); H01L 29/16 (2006.01); H01L 29/861 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
C30B 31/02 (2013.01); C30B 29/04 (2013.01); C30B 33/02 (2013.01); H01L 21/041 (2013.01); H01L 21/324 (2013.01); H01L 29/1602 (2013.01); H01L 29/6603 (2013.01); H01L 29/861 (2013.01);
Abstract
Boron-doped diamond and methods for making it are provided. The doped diamond is made using an ultra-thin film of heavily boron-doped silicon as a dopant carrying material in a low temperature thermal diffusion doping process.