The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Feb. 07, 2013
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Uwe Schiller, Tuebingen, DE;
Volkmar Senz, Metzingen, DE;
Jochen Franz, Reutlingen, DE;
Helmut Grutzeck, Kusterdingen, DE;
Michaela Mitschke, Reutlingen, DE;
Assignee:
ROBERT BOSCH GMBH, Stuttgart, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/10 (2006.01); B81B 3/00 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01); B81C 1/00 (2006.01); H04R 29/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0078 (2013.01); B81C 1/00253 (2013.01); G01L 9/0042 (2013.01); G01L 19/0672 (2013.01); B81C 2203/075 (2013.01); H04R 29/00 (2013.01);
Abstract
Measures are described with the aid of which not only a rupture, but also cracks may be detected in the diaphragm structure of a micromechanical component with the aid of circuit means integrated into the diaphragm structure. At least some circuit elements are integrated for this purpose into the bottom side of the diaphragm, i.e., into a diaphragm area directly adjoining the cavern below the diaphragm.