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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9850120 B1

PDFFull Text
Date of Patent:
Dec. 26, 2017

Filed:

Feb. 07, 2013

Micromechanical component having a diaphragm

Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Uwe Schiller, Tuebingen, DE;

Volkmar Senz, Metzingen, DE;

Jochen Franz, Reutlingen, DE;

Helmut Grutzeck, Kusterdingen, DE;

Michaela Mitschke, Reutlingen, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorneys:

Norton Rose Fulbright US LLP

Gerard Messina

Primary Examiner:

Jami M Valentine

Int. Cl.
CPC ...
H01L 29/10 (2006.01); B81B 3/00 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01); B81C 1/00 (2006.01); H04R 29/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0078 (2013.01); B81C 1/00253 (2013.01); G01L 9/0042 (2013.01); G01L 19/0672 (2013.01); B81C 2203/075 (2013.01); H04R 29/00 (2013.01);
Abstract

Measures are described with the aid of which not only a rupture, but also cracks may be detected in the diaphragm structure of a micromechanical component with the aid of circuit means integrated into the diaphragm structure. At least some circuit elements are integrated for this purpose into the bottom side of the diaphragm, i.e., into a diaphragm area directly adjoining the cavern below the diaphragm.

Find Patent Forward Citations

Schiller, Uwe. (2017). Micromechanical component having a diaphragm (U.S. Patent No. 9850120). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9850120

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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