The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 19, 2017

Filed:

Nov. 08, 2013
Applicant:

Oerlikon Trading Ag, Trübbach, Trübbach, CH;

Inventors:

Helmut Rudigier, Bad Ragaz, CH;

Jürgen Ramm, Maienfeld, CH;

Beno Widrig, Bad Ragaz, CH;

Troy Vom Braucke, Buchs, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/32 (2006.01); C23C 14/02 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/325 (2013.01); C23C 14/022 (2013.01); C23C 14/025 (2013.01); H01J 37/32055 (2013.01); H01J 37/32064 (2013.01);
Abstract

The invention relates to a method for coating work pieces in a vacuum treatment system having a first electrode embodied as a target, which is part of an arc vaporization source. Using the first electrode, an arc is operated with an arc current and vaporizes material. A bias voltage is applied to a bias electrode, which includes a second electrode that is embodied as a work piece holder, together with the work pieces. Metal ion bombardment is carried out either to pretreat the work pieces or in at least one transition from one layer to an adjacent layer of a multilayer system, so that neither a significant material removal nor a significant material buildup occurs, but instead, introduces metal ions into a substrate surface or into a layer of a multilayer system.


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