The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 19, 2017

Filed:

Oct. 12, 2015
Applicant:

Singulus Technologies Ag, Kahl am Main, DE;

Inventors:

Wolfgang Becker, Schaafheim, DE;

Edgar Rüth, Kahl am Main, DE;

Jochen Heilingbrunner, Hanau, DE;

Assignee:

Singulus Technologies AG, Kahl am Main, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 43/10 (2006.01); B65G 43/08 (2006.01); C23C 16/00 (2006.01); B65G 47/26 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B65G 43/10 (2013.01); B65G 43/08 (2013.01); B65G 47/261 (2013.01); C23C 16/00 (2013.01); H01L 21/67253 (2013.01); H01L 21/67276 (2013.01); H01L 21/67706 (2013.01); B65G 2203/042 (2013.01); B65G 2811/0631 (2013.01); B65G 2811/0673 (2013.01);
Abstract

A method and a device for stringing together objects in transport systems, preferably in coating systems, for adjusting the distance between two objects, preferably substrates or substrate holders, being arranged one behind the other, wherein the front object moves at a process speed vin the transport system and the rear object is at an undefined distance from the front object. The method comprises the following steps: (a) accelerating the rear substrate to an initial speed v>v; (b) detecting an increase in the driving torque when the rear substrate moves against the front substrate; (c) delaying the rear substrate by a predetermined value in order to establish a predetermined distance afrom the front substrate; and (d) adjusting the speed of the rear substrate to the process speed v.


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