The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Apr. 19, 2013
Applicant:
Konica Minolta, Inc., Tokyo, JP;
Inventor:
Hideyuki Eguchi, Takatsuki, JP;
Assignee:
KONICA MINOLTA, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/09 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1875 (2013.01); H01L 41/0477 (2013.01); H01L 41/0815 (2013.01); H01L 41/1876 (2013.01);
Abstract
Disclosed is a piezoelectric element wherein a lower electrode made of Pt, a buffer layer made of PLT, and a piezoelectric thin film to be a perovskite ferroelectric thin film are formed in this order on a substrate. The average crystal grain size of Pt forming the lower electrode is not smaller than 50 nm and not larger than 150 nm.