The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Feb. 01, 2016
Pyreos Ltd., Edinburgh, GB;
Carsten Giebeler, Edinburgh, GB;
Neil Conway, Fife, GB;
Pyreos, Ltd., Edinburgh, GB;
Abstract
A Method for producing a microsystem () with pixels includes: producing a thermal silicon oxide layer on the surface of a silicon wafer as a base layer () by oxidation of the silicon wafer; producing a silicon oxide thin layer on the base layer as a carrier layer ()by thermal deposition; producing a platinum layer on the carrier layer by thermal deposition, whereby an intermediate product is produced; cooling the intermediate product to room temperature; pixel-like structuring of the platinum layer by removing surplus areas of the platinum layer, whereby bottom electrodes () of the pixels () are formed in pixel shape on the carrier layer in remaining areas; removing material on the side of the silicon wafer facing away from the base layer, so a frame () remains and a membrane () formed by the base layer and the carrier layer is spanned by the frame.