The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Dec. 10, 2015
Industrial Technology Research Institute, Hsinchu, TW;
Hsin-Hung Lee, Miaoli County, TW;
Cheng-Yu Lee, Taipei, TW;
Chun-Lin Chiang, New Taipei, TW;
Kun-Chih Tsai, Hsinchu, TW;
Win-Ti Lin, Hsinchu County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.