The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 12, 2017

Filed:

Mar. 30, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Masaki Mizutani, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G02B 19/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 19/0047 (2013.01); G02B 19/0028 (2013.01); G03F 7/70075 (2013.01); G03F 7/70191 (2013.01);
Abstract

Provided is an illumination optical apparatus that illuminates the surface with light from a light source and includes an optical integrator (the integrator) configured to form a plurality of secondary source images (the images); a adjuster having a plurality of adjusting elements for adjusting a light of the images; and a consensor configured such that the adjuster is in a conjugate relationship with the end surface of the integrator, wherein the element is located at positions, which corresponds to a secondary source formed by an odd reflection times in the first direction by the integrator and a secondary source formed by an even times and a secondary source formed by an odd times in the second direction and a secondary source formed by an even times, wherein the element is not located at a position which corresponds to a secondary source formed by no reflection in the integrator.


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