The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 12, 2017

Filed:

Mar. 13, 2014
Applicant:

National Institute of Advanced Industrial Science and Technology, Tokyo, JP;

Inventors:

Kazuya Kikunaga, Saga, JP;

Kazuhiro Nonaka, Saga, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 29/12 (2006.01); G01R 29/24 (2006.01); G06F 1/00 (2006.01); H01L 21/00 (2006.01); G01R 29/14 (2006.01); G01V 3/08 (2006.01); G01R 29/08 (2006.01); G06T 11/20 (2006.01); G01H 11/06 (2006.01);
U.S. Cl.
CPC ...
G01R 29/24 (2013.01); G01H 11/06 (2013.01); G01R 29/0878 (2013.01); G01R 29/14 (2013.01); G01V 3/088 (2013.01); G06F 1/00 (2013.01); G06T 11/206 (2013.01); H01L 21/00 (2013.01); H01L 2221/00 (2013.01);
Abstract

A static electricity distribution measuring apparatus () according to the present disclosure measures the static electricity distribution on a measurement surface of a measurement target (), and is provided with: an array antenna () that receives electric fields generated from each of a plurality of areas () on the measurement surface through vibration; a vibrator () that vibrates the measurement target () or the array antenna (); a measurer () that measures at least one from among intensity, frequency and phase of the electric fields in each of the plurality of areas () received by the array antenna (); a calculator () that calculates an amount of static electricity for each of the plurality of areas () based on measurement results by the measurer (); and a drawer () that draws the static electricity distribution on the measurement surface based on the amount of static electricity in each of the plurality of areas (). The array antenna () has a plurality of antenna elements () respectively corresponding to the plurality of areas ().


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