The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Jul. 12, 2016
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Hiroaki Kakuma, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); H04N 5/225 (2006.01); G01F 1/708 (2006.01); G06T 7/20 (2017.01); H01L 21/67 (2006.01); G01P 13/00 (2006.01); C03C 15/00 (2006.01);
U.S. Cl.
CPC ...
H04N 5/2251 (2013.01); G01F 1/7086 (2013.01); G01P 13/0006 (2013.01); G06T 7/20 (2013.01); H01L 21/6715 (2013.01); H01L 21/67253 (2013.01);
Abstract
Imaging is performed such that a flow-down path of the liquid from the nozzle arranged above a work to an upper surface of the work is included in an imaging field of view (Step S). A total value of pixel values of pixels belonging to each pixel column composed of the pixels arranged in a line along a flow-down direction of the liquid in an evaluation region corresponding to the flow-down path out of an imaged image is calculated (Step S-S). Based on a change mode of the total value in an orthogonal direction orthogonal to the flow-down direction, presence or absence of the flow-down of the liquid is determined (Step S-S).