The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2017

Filed:

Dec. 16, 2013
Applicants:

Flisom Ag, Duebendorf, CH;

Empa, Duebendorf, CH;

Inventors:

Adrian Chirila, Herznach, CH;

Stephan Buecheler, Dachsberg, DE;

Fabian Pianezzi, Altdorf, CH;

Patrick Reinhard, Zurich, CH;

Ayodhya Nath Tiwari, Meilen, CH;

Assignees:

FLISON AG, Duebendorf, CH;

EMPA, Duebendorf, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0336 (2006.01); H01L 31/032 (2006.01); H01L 31/18 (2006.01); C23C 14/24 (2006.01); C23C 14/14 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0323 (2013.01); C23C 14/14 (2013.01); C23C 14/24 (2013.01); H01L 21/02422 (2013.01); H01L 21/02568 (2013.01); H01L 21/02579 (2013.01); H01L 21/02631 (2013.01); H01L 31/18 (2013.01);
Abstract

A method () and deposition zone apparatus () for fabricating thin-film optoelectronic devices (), the method comprising: providing a potassium-nondiffusing substrate (), forming a back-contact layer (); forming at least one absorber layer () made of an ABC chalcogenide material, adding at least two different alkali metals, and forming at least one front-contact layer () wherein one of said at least two different alkali metals is potassium and where, following forming said front-contact layer, in the interval of layers () from back-contact layer (), exclusive, to front-contact layer (), inclusive, the comprised amounts resulting from adding at least two different alkali metals are, for potassium, in the range of 500 to 10000 ppm and, for the other of said at least two different alkali metals, in the range of 5 to 2000 ppm and at most ½ and at least 1/2000 of the comprised amount of potassium. The method () and apparatus () are advantageous for more environmentally-friendly production of photovoltaic devices () on flexible substrates with high photovoltaic conversion efficiency and faster production rate.


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