The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Apr. 06, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Ju Hak Song, Hwaseong-si, KR;
Sung Min Jo, Yongin-si, KR;
Abstract
A semiconductor apparatus includes gate electrodes and interlayer insulating layers alternately stacked on a substrate, channel regions penetrating through the gate electrodes and the interlayer insulating layers, a conductive layer extending from an uppermost layer among the interlayer insulating layers to the substrate by penetrating through the gate electrodes and the interlayer insulating layers between the channel regions, and having an uneven pattern on an outer side wall thereof, a spacer layer disposed on the outer side wall, and a barrier layer disposed on at least one side surface of the spacer layer, wherein the spacer layer and the barrier layer have different etch selectivities.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile