The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Feb. 26, 2016
Applicant:
Seagate Technology Llc, Cupertino, CA (US);
Inventors:
XiaoMin Yang, Livermore, CA (US);
Shuaigang Xiao, Fremont, CA (US);
Yautzong Hsu, Fremont, CA (US);
Zhaoning Yu, Palo Alto, CA (US);
Kim Y. Lee, Fremont, CA (US);
David S. Kuo, Palo Alto, CA (US);
Assignee:
Seagate Technology LLC, Cupertino, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/033 (2006.01); G03F 7/00 (2006.01); G11B 5/74 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0338 (2013.01); G03F 7/0002 (2013.01); G11B 5/746 (2013.01); H01L 21/0332 (2013.01); H01L 21/0335 (2013.01); H01L 21/0337 (2013.01);
Abstract
Provided is an apparatus that includes a substrate; a first hard-mask pattern that includes a number of first features disposed over a top surface of the substrate; and a second hard-mask pattern disposed over the first hard-mask layer. The second hard-mask pattern includes a number of second features overlapping one or more of the first features.