The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Mar. 13, 2015
Applicants:
Ho Seob Kim, Incheon, KR;
Byeng Jin Kim, Incheon, KR;
DO Jin Seong, Seoul, KR;
Inventors:
Assignee:
CEBT CO., LTD., Asan-si, Chungcheongnam-Do, KR;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/10 (2006.01); H01J 37/26 (2006.01); H01J 37/20 (2006.01); H01J 37/10 (2006.01); H02N 2/00 (2006.01); H02N 2/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/261 (2013.01); H01J 37/10 (2013.01); H01J 37/20 (2013.01); H02N 2/006 (2013.01); H02N 2/026 (2013.01); H01J 2237/10 (2013.01); H01J 2237/20264 (2013.01); H01J 2237/2602 (2013.01);
Abstract
Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.