The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2017

Filed:

Dec. 15, 2014
Applicant:

Ffei Limited, Hemel Hempstead, Hertfordshire, GB;

Inventor:

Martin Philip Gouch, Hemel Hempstead, GB;

Assignee:

FFEI Limited, Hemel Hempstead, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/38 (2006.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
G02B 21/006 (2013.01); G02B 7/38 (2013.01); G02B 21/367 (2013.01);
Abstract

A method for estimating an in-focus position of a target using an image scanning apparatus is provided. The in-focus position is monitored at a seed location and an end location on the target and a pre-scan path is calculated between these locations. A pre-scan is then performed and a focus parameter is monitored for a plurality of locations along the pre-scan path. An imaging scan is next performed wherein the target is imaged along an image scan path and a focus parameter is monitored for a plurality of locations along said path. The focal height of the apparatus is adjusted during the imaging scan by comparing the focal parameter monitored for a current location on the image scan path with the focal parameter monitored for a similar location on the pre-scan path. The focal parameter monitored for different locations on the image scan path may also be compared.


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