The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Dec. 19, 2016
Applicants:
Yoshikazu Akiyama, Kanagawa, JP;
Akira Shimofuku, Kanagawa, JP;
Keiji Ueda, Kanagawa, JP;
Inventors:
Assignee:
Ricoh Company, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C30B 1/02 (2006.01); C30B 29/32 (2006.01); C23C 14/24 (2006.01); C23C 14/34 (2006.01); B41J 2/16 (2006.01); H01L 41/187 (2006.01); H01L 41/39 (2013.01); H01L 41/113 (2006.01); H01L 41/29 (2013.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
C30B 1/023 (2013.01); B41J 2/162 (2013.01); B41J 2/1646 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); C30B 29/32 (2013.01); H01L 41/113 (2013.01); H01L 41/1876 (2013.01); H01L 41/29 (2013.01); H01L 41/318 (2013.01); H01L 41/39 (2013.01);
Abstract
A PZT precursor solution is used for forming a PZT film by a sol-gel method. The PZT precursor solution includes a solvent; a component that forms a crystal of PZT by crystallization, the component being dissolved in the solvent; and an element that inhibits crystal growth of PZT, the element being dissolved in the solvent.