The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
May. 27, 2016
Applicant:
Tdk Corporation, Minato-ku, Tokyo, JP;
Inventors:
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); B08B 5/00 (2006.01); B08B 9/08 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B08B 5/00 (2013.01); B08B 9/08 (2013.01); H01L 21/67393 (2013.01); H01L 21/67772 (2013.01);
Abstract
A gas purge unit includes an intake nozzle, a pivotable body, and an O-ring. The intake nozzlehas a nozzle openingflowing out a cleaning gas. The pivotable bodyis arranged in ring shape to surround a cylindrical projectionof the nozzle, and is provided with a contact partcapable of detachably contacting with an intake porton a tip portion of the pivotable body. The ring-shaped O-ringis held between a rear end of the pivotable bodyand a base portionof the nozzlein a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection