The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2017

Filed:

Jul. 01, 2016
Applicant:

Draka Comteq B.v., Amsterdam, NL;

Inventors:

Igor Milicevic, Helmond, NL;

Gertjan Krabshuis, Sint Oedenrode, NL;

Mattheus Jacobus Nicolaas Van Stralen, Tilburg, NL;

Peter Gerharts, Eindhoven, NL;

Johannes Antoon Hartsuiker, Eindhoven, NL;

Assignee:

Draka Comteq, B.V., Amsterdam, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23F 1/00 (2006.01); H01J 37/32 (2006.01); C03B 37/012 (2006.01); C03B 37/018 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3244 (2013.01); C03B 37/01228 (2013.01); C03B 37/01861 (2013.01); C03C 15/00 (2013.01); H01J 37/32339 (2013.01); H01J 2237/334 (2013.01);
Abstract

A method activates the inner surface of a substrate tube via plasma etching with a fluorine-containing etching gas. An exemplary method includes the steps of (i) supplying a supply flow of gas to the interior of a substrate tube, wherein the supply flow includes a main gas flow and a fluorine-containing etching gas flow, (ii) inducing a plasma via electromagnetic radiation to create a plasma zone within the substrate tube's interior, and (iii) longitudinally reciprocating the plasma zone over the length of the substrate tube between a reversal point near the supply side and a reversal point near the discharge side of the substrate tube. The flow of the fluorine-containing etching gas is typically provided when the plasma zone is near the supply side reversal point.


Find Patent Forward Citations

Loading…