The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2017
Filed:
Feb. 22, 2017
Nikon Corporation, Tokyo, JP;
Yoshitomo Nagahashi, Takasaki, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A liquid immersion exposure apparatus includes a first flow path which receives a first portion of immersion liquid from a liquid supply path; a second flow path which receives a second portion of immersion liquid from the liquid supply path; a first supply port connected to the first flow path and from which a portion of the first portion of the immersion liquid can be supplied and a second supply port connected to the second flow path and from which a portion of the second portion of the immersion liquid can be supplied; first and second adjusting devices which adjust a quantity of the immersion liquid to be supplied from the first and second supply ports; and third and fourth flow paths which allow receipt of the immersion liquid that has not been introduced to the first and second supply ports from the first and second flow paths.