The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2017

Filed:

May. 23, 2013
Applicant:

Consejo Superior DE Investigaciones Cientificas (Csic) [es/es], Madrid, ES;

Inventors:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); G01N 21/17 (2006.01); G01Q 10/06 (2010.01); B82B 3/00 (2006.01); G01B 21/20 (2006.01); B81C 99/00 (2010.01); G01H 9/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1702 (2013.01); B81C 99/003 (2013.01); B82B 3/0085 (2013.01); G01B 21/20 (2013.01); G01Q 10/06 (2013.01); G01Q 20/02 (2013.01); G01H 9/00 (2013.01); G01N 2201/06113 (2013.01);
Abstract

Method and system in optical microscopy based on the deflection of micro- and nanomechanical structures, upon impact of a laser beam thereon, which simultaneously and automatically provides a spatial map of the static deflection and of the form of various vibration modes, with vertical resolution in the subangstrom range. The invention comprises at least one mechanical structure, an incident laser beam sweeping the surface of the structure, an optometric detector for capturing the laser beam, and frequency excitation means that generate at least two sinusoidal signals at different frequencies in the mechanical structure.


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