The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2017

Filed:

Jun. 12, 2014
Applicant:

Dic Corporation, Tokyo, JP;

Inventors:

Tomoyuki Imada, Ichihara, JP;

Yusuke Sato, Ichihara, JP;

Seiji Kimoto, Ichihara, JP;

Assignee:

DIC Corporation, Tokyo, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); C08G 8/20 (2006.01); C09D 161/12 (2006.01); C07C 39/17 (2006.01); G03F 7/022 (2006.01); G03F 7/023 (2006.01); C08G 8/04 (2006.01);
U.S. Cl.
CPC ...
C08G 8/20 (2013.01); C07C 39/17 (2013.01); C08G 8/04 (2013.01); C09D 161/12 (2013.01); G03F 7/004 (2013.01); G03F 7/0226 (2013.01); G03F 7/0236 (2013.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01); C07C 2603/92 (2017.05);
Abstract

Provided is a compound containing a phenolic hydroxy group which has excellent heat resistance, a resist composition which has excellent thermal decomposition resistance, optical sensitivity and resolution, and a composition for a resist underlayer coating which has excellent thermal decomposition resistance and dry etching resistance. The compound containing a phenolic hydroxy group has a molecular structure represented by Structural Formula (1) below: wherein Ris a hydrogen atom, an alkyl group or an aryl group, n is an integer of 2 to 10, Ris any one of an alkyl group, an alkoxy group, an aryl group, an aralkyl group and a halogen atom, m is an integer of 0 to 4, and when m is 2 or greater, a plurality of R's may be the same as or different from each other and may be bonded to either one of two aromatic rings of the naphthylene skeleton.


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