The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2017

Filed:

Mar. 29, 2016
Applicant:

Shinmaywa Industries, Ltd., Takarazuka-shi, Hyogo, JP;

Inventors:

Kensuke Uemura, Takarazuka, JP;

G. Alexey Remnev, Takarazuka, JP;

Assignee:

SHINMAYWA INDUSTRIES, LTD., Takarazuka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/305 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3053 (2013.01); H01J 37/08 (2013.01); H01J 2237/006 (2013.01); H01J 2237/0825 (2013.01); H01J 2237/20214 (2013.01);
Abstract

A de-coating method includes: exposing a coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CFthat promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.


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